Diagnostics of Reactive Plasma Using a Planar High-Frequency Probe During the Deposition of Layers with Antiviral Effects
As part of the internship, the student will be involved in the research of plasma deposition of crystalline CuFeO2 layers with antiviral effects. The deposition of CuFeO2 layers will be carried out using the method of reactive pulsed magnetron sputtering with an additional high-frequency inductively coupled plasma operating in resonance with the electron cyclotron wave.…
